Thermochuck Replacement for the Axcelis UV Gemini Photostabilizer
Replacement Thermochuck used on the Axcelis UV Gemini Photostabilizer tool.
Currently in use at a major US semiconductor fab.
Improved design to reduce heater failures.
ESP Improvements
Design a heater with a more balanced trace element profile that has leads on the perimeter.
Redesign the insulator and keeper plate to accommodate new lead location.
Eliminate spring washers, replace with locking washers to prevent screw backing out during thermal cycling.
Upsize screw thread size to allow for higher torque.
Higher torque applies more pressure on the keeper plate and therefore the insulator and heater element to prevent heater element burnup.
Product Specifications
Connections
Size/Type
Verifications
Power Supply
3-contact Anderson Powerpole
Continuity, Resistance, Voltage
Thermocouples
Mini K-Type Connectors (2x)
Resistance, Temp Differential
Vacuum Line
Brass Hose Barb for 1/8″ ID Hose
Wafer Chucking Test
Cooling Lines
Swagelok Fittings for 1/4″ Tube OD
Static Pressure Test
Accessories
Wafer Retaining Pins (4x), Vacuum Plug Set Screws (4x)
Included with Shipment
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Fill out the form below or send an email to our team at quotes@espspares.com